Mini Map

Microsystems and semiconductor fabrication

ECE5838

Synopsis

Get ready to dive into the fascinating world of semiconductor devices, microsensors, microactuators, and the microtechnologies that power them. In this unit, you’ll explore the core principles and materials behind MEMS and semiconductor devices, and learn how to characterise them electrically and mechanically. You’ll investigate essential MEMS structures like cantilever beams and comb drives, as well as patterns for diodes and transistors. You'll also get hands-on with key microfabrication techniques, such as photolithography, etching, deposition, and more. Through lab work, project-based learning, simulations, and device construction, you'll build practical skills that connect directly to real-world applications.

Sourced from the Monash Handbook 2026.

Quick facts

Credit points
6
Level
5
Audience
Postgraduate
Type
Coursework
School
Faculty of Engineering
Faculty
Department of Electrical and Computer Systems Engineering
Handbook year
2026

Prerequisites

No prereqs in the handbook graph.

What it unlocks

Nothing in the visible graph depends on this unit.

Offerings (1)

  • Second semesterMalaysia · ON-CAMPUS

Listed in 1 area of study

  • Semiconductor and microsystems engineering Part A. Specialist studies